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Process air conditioning in the production of electronic equipment and semiconductors
Selective dehumidification for every processing step
Many manufacturing processes in the production of electronic parts and semiconductors demand extremely dry air – in some cases with dew points of way below 0 °C. These low dew points can be easily achieved using efficient adsorption dryers, also selectively within a machine.
Many electronic and electromechanical components react highly sensitive to moisture. At an excessive humidity level problems such as corrosion at the conducting points and condensation on the surface of microchips can arise in the production of electronic equipment and semiconductors. Moreover, some chemical substances are particularly interference-prone: Excessive humidity values can, for instance, result in poor adhesion of photoresist, which in turn leads to malfunctions of the semiconductor assembly. Many of these processes have to be specifically dehumidified locally and independently from the ambient air. Using adsorption dryers of the TTR series, selective dehumidification operations can be realized – i.a. by deliberately feeding dry air via hoses.
Cost-efficient realization of process air conditioning with adsorption dryers
The stationary and mobile adsorption dryers of the TTR series – by use of one of the three variations of the TTR functional principle – ensure a high dehumidification performance while simultaneously keeping the energy consumption low. The mobile adsorption dryers TTR 400 D and TTR 500 D are particularly well suited for the selective process air conditioning in the electronics and semiconductor industry. Moreover, it is possible to realize with our assembly work tents in combinations with dehumidifying closed climates. For process air conditioning in larger spaces or assembly lines, where low dew points are essential, we recommend the application of the stationary adsorption dryers serially numbered from TTR 800 to TTR 13500.
TTR 400 D and TTR 500 D achieve extremely low dew points
Both innovative adsorption dryers marked with "D" for the Duoventic air volume regulation, TTR 400 D and TTR 500 D, achieve maximum flexibility when adjusting the required amount of dry air. In contrast to conventional through-air operation, by use of these two mobile adsorption dryers you can achieve dew point temperatures reduced by up to 30 °C compared to the sucked in process air. Therefore, dew points far below 0 °C can be achieved, what results in considerably lower drying stages and in considerably more energy-efficient operation! Low dew points in the sub-zero range are required e.g. for the interim storage of electronic parts in drying cabinets until they can be fed on to further production processes. Another example, where low dew points of well below -40 °C have to be achieved, is represented by the QA test benches in the production of high-performance semiconductors (IGBT). These must not be allowed to freeze, despite the extremely low temperatures, which can only be managed via rigorous dehumidification.
Consultation and mobile testing appliances: make use of our industrial services
For you as manufacturer of electronic equipment and semiconductors the Trotec Group not only provides devices but technically and economically perfected solutions. Depending on the order volume, our industrial services can relate to the overall planning of the process air conditioning or just sections thereof. Moreover, we have mobile units on offer which can be used to test the planned process air conditioning in advance. This way, you can be sure that the proposed solution actually works.
Upon request, we will readily produce tailor-made desiccant dehumidifiers as special models “made in Germany” perfectly geared to your needs, e.g.:
- TTR industrial desiccant dehumidifiers with hygienic design
- TTR industrial desiccant dehumidifiers for PWIS-free dry air
- TTR industrial desiccant dehumidifiers with extremely low dew point
Makes use of the possibility of having special models with tailored components for your individual needs planned, designed and manufactured in close consultation with our specialists.
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